来自SCS G3家族的精密旋转涂敷系统用于在平面基板上精确的涂敷流体,如光刻胶、聚酰亚胺、金属**物、掺杂物、和二氧化硅薄膜。G3系列旋转涂敷机设立操作精确性和编程灵活性的新标准,提供了高水平的旋转精度和重复性及加速减速控制。
特性及规格包括:
-- Fast, simple programming by means of microprocessor-based control, using front panel LCD display and keypad
借助微处理器控制,通过前面板LCD及键盘操作实现快速简单的编程
-- Closed loop servomotor control for precise speed regulation
闭环伺服电机控制实现精确的速度调节
-- Capacity to execute one recipe with acceleration time adjustable from 1-30 seconds, spin for preset speed and time and deceleration time adjustable from 1-30 seconds.
可执行涂敷程序的加速调节1-30秒,预设的旋转速度和时间及加速度调节1-30秒
-- Spin profiles adjustable in 1.0 rpm increments, 0.1 second timing increments, and 1.0 second increments for dwell time, with precise repeatability from cycle-to-cycle
旋转曲线调整以1rpm为增量,0.1秒时间增量和1秒保持时间增量及精确的循环重复性
-- Customer evaluations yielded thickness uniformity in the range of +/- 3.0%
用户评估产出的厚度均匀性在±3%左右
-- Compact housing on all sizes for convenience when using fume hoods
紧凑的外壳便于在通风橱柜中使用
-- Chuck Rotation Speed: 0-9,999 RPM in 1 RPM increments
卡盘的旋转速度0-9,999转/分钟,以1转/分钟为增量
-- Acceleration/Deceleration: 0.1 to 25.5 seconds, 0.1 second increments (with inertial limitations)
加速/减速:0.1-25.5秒,以0.1为增量(惯性限制)
-- Dwell time: 0-999 seconds in 1 second increments
保持时间:0-999秒以1秒为增量
-- Unit Dimensions: 30.5cm W x 41.9cm D x 30.2cm H